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PhotriX Direct Sapphire Lightpipe Configuration

The PhotriX Series non-contact IR thermometer. Suitable for aggressive chemical environments and is commonly used in vacuum process chambers and reactors. Available in 5 different infrared spectral responses (650nm, 880nm, 900nm, 1550nm and 700-1650nm) with temperatures measured between 30°C and 1300°C.

Our most accurate pyrometer, the PhotriX Series has the industry’s best signal-to-noise ratio allowing lower temperatures to be measured with unmatched precision for control of high-value processes and research applications. This configuration of our Photrix series uses a sapphire optical rod (so called “lightpipe”) as the optics to collect the infrared radiation from the target. The advantages of the lightpipe optics is to provide lower temperature measurement and the ability to easily integrate into vacuum reactors often used for advanced material deposition (growth) and etch (removal) processes.

The Photrix with lightpipe optics is offered in 5 spectral response (wavelength) versions and has the following features:

  • Low Temperature Capability (see chart below for details)
    • 30 to 670 °C with 700-1650nm spectral response
    • 70 to 110 °C with 1550nm spectral response
    • 210 to 1300 °C with 900nm spectral response
    • 220 to 1300 °C with 880nm spectral response
    • 400 to 1500 °C with 650nm spectral response
  • Fast Response (1ms)
  • Accuracy of +/- 1.5 °C or 0.15% of reading
  • Precision of 0.01 °C (see TN-828)

Available options include analog output (user selectable 4-20mA or 0-10V) and multi-channel interface modules allowing up to eight (8) sensors to be integrated into a single digital signal with parallel analog outputs. Standard system includes all necessary electrical cables, power supply, PC interface software and documentation/calibration.

Typical Applications:

  • Semiconductor
  • Thin-Film CIGS Solar deposition
  • Thin-Film Amorphous Silicon deposition 
  • CZ Crystal Growth


 
      Temperature range
      Celsius Fahrenheit
Configuration P/N Spectral
response
Description of 2mm diameter
Lightpipe Collection Optics
 Min 
(°C)
Max
(°C)
Min
(°F)
Max
(°F)
ML-GAPX-LP2-XXX 700-1650nm XXX mm length 30 670 86 1238
ML-GAPX-LP2-XXX-SS-YYY 700-1650nm XXX mm length, with sapphire sheath YYY mm length 30 670 86 1238
ML-GAPX-LP2-XXX-SQ-YYY 700-1650nm XXX mm length, with quartz sheath YYY mm length 30 670 86 1238
ML-AAPX/088-LP2-XXX 880nm XXX mm length 220 1300 428 2372
ML-AAPX/088-LP2-XXX-SS-YYY 880nm XXX mm length, with sapphire sheath YYY mm length 220 1300 428 2372
ML-AAPX/088-LP2-XXX-SQ-YYY 880nm XXX mm length, with quartz sheath YYY mm length 220 1300 428 2372
ML-AAPX/090-LP2-XXX 900nm  XXX mm length 210 1300 410 2372
ML-AAPX/090-LP2-XXX-SS-YYY 900nm XXX mm length, with sapphire sheath YYY mm length 210 1300 410 2372
ML-AAPX/090-LP2-XXX-SQ-YYY 900nm XXX mm length, with quartz sheath YYY mm length 210 1300 410 2372
ML-GAPX/155-LP2-XXX 1550nm XXX mm length 70 1100 158 2012
ML-GAPX/155-LP2-XXX-SS-YYY-Y 1550nm XXX mm length, with sapphire sheath YYY mm length 70 1100 158 2012
ML-GAPX/155-LP2-XXX-SQ-YYY 1550nm XXX mm length, with quartz sheath YYY mm length 70 1100 158 2012
 
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