Luxtron m920 Semiconductor Module

Fiber Optic Temperature Sensing for OEMs between -100 to 330ºC

Advanced Energy's Luxtron four-channel m924 and two-channel m922 semiconductor modules are designed for etcher and wafer fab equipment temperature monitoring of electrostatic chucks, chambers, and other devices.

Mix and match components
Works with current semiconductor Luxtron brand Fluoroptic probes and fiber optic extensions
Built-in calibration tables match to custom AE probes for high accuracy measurements
Accuracy of up to ±0.05°C is achievable (probe dependent)

The complete Luxtron^® m920 series OEM solution is built using the electronics module assembly with two boards plus probes. The main board contains fiber optic temperature sensing channels, digital output (RS232 ASCII and RS485 Modbus), and power connection. The analog output board provides 0 to 10 V or 4 to 20 mA output and is mounted above the main board. An optional metal enclosure is also available.

The m920 series system uses Fluoroptic^® technology. The m920 series main board conditions the measurement signal from Fluoroptic probes and reports a calibrated temperature to the OEM control system.

Performance:

Channels	m922: 2 m924: 4
Temperature Range	-100 to 330°C (probe dependent)
Measurement Resolution	0.01°C
Measurement Rate	Up to 50 Hz per channel
Accuracy	±0.05°C (probe dependent)

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